Instruments for SXR & EUV!

Technical Specifications

Related Accessories
-> VUV Source
-> Vacuum Accy
-> Cal Diode

New Flat-field Diffraction Grating

The new grating extends the efficient range of the McPherson Model 251MX for more sensitive spectral acquisition. With a digital camera and adjustable slits it now works from 1 to 200 nanometers (6 to 1500 eV) or more.

Efficient 6 to 1500 eV Spectrometer McPherson's SXR spectrometer, Model 251MX, is now available with improved efficiency over a wider range. A new diffraction grating is available! The new Gold coated diffraction grating is ideal for work from 50 to 200 nanometers. It joins the other gratingsa fitting this model: 2400, 1200 and 300 g/mm. Users can exchange gratings for range or efficiency even while the instrument is under vacuum. The units grazing incidence angles provide best reflective efficiency. The grating is available for new and existing instrumentation and may be retrofit in the field.

Optimized Range and Resolution The new diffraction grating is useful for measurements of VUV radiation and emission spectra with sub-nanometer spectral resolution. To resolve closely spaced spectral lines, the adjustable slit width provides for best light throughput and better spectral resolution. The adjustable detector mount accommodates direct-detection digital cameras or microchannel plate intensifiers. It also allows users to reach longer or shorter wavelengths and the ability to collect different simultaneous wavelength swaths for general purpose spectroscopy, plasma physics, and process monitoring all without compromising resolution or signal strength.

SXR Spectrometer Applications Applications for the extreme vacuum ultraviolet and soft x-ray spectrometer include detecting halogens, plasma physics, astrophysics, spectral test and calibration. Attosecond pulse, high harmonic lasers (HHG), and EUVL semiconductor source and process development too. It is a high vacuum instrument working at 10E-6 torr vacuum; ultra high vacuum 10E-10 torr versions are available.

Furnished with spectral calibration certificate, the McPherson spectrometer is available with accessories. We supply sources for wavelength calibration, thin film filters, gated microchannel plate intensifiers and vacuum differential sections. We are available to help make sure the ultraviolet spectrometer is ready for implementation in your specific application.